MEMS and MicroNano System /Microelectronics technology, MEMS and MicroNano System based bio/chemical and mechanical sensors, Polymer MEMS and MicroNano System , RFMEMS and MicroNano System , Thin films for MEMS and MicroNano System , In-situ observation of semiconductor processes
Personal Information
Prof Prem Pal
Male
Department of Physics Indian Institute of Technology Hyderabad, main road, KandiSangareddy, Telangana, India - 502285